|
|
【NAS-1638汚染度規格表】
|
NAS等級
|
| 粒子サイズ(μ) |
00 |
0
|
1
|
2
|
3
|
4
|
5
|
|
5~15
|
125
|
250
|
500
|
1,000
|
2,000
|
4,000
|
8,000
|
|
15~25
|
22
|
44
|
89
|
178
|
356
|
712
|
1,425
|
|
25~50
|
4
|
8
|
16
|
32
|
63
|
126
|
253
|
|
50~100
|
1
|
2
|
3
|
6
|
11
|
22
|
45
|
|
>100
|
0
|
0
|
1
|
1
|
2
|
4
|
8
|
|
NAS等級
|
|
粒子サイズ(μ)
|
6
|
7
|
8
|
9
|
10
|
11
|
12
|
|
5~15
|
16,000
|
32,000
|
64,000
|
128,000
|
256,000
|
512,000
|
1,024,000
|
|
15~25
|
2,850
|
5,700
|
11,400
|
22,800
|
45,600
|
91,200
|
182,400
|
|
25~50
|
506
|
1,012
|
2,025
|
4,050
|
8,100
|
16,200
|
32,400
|
|
50~100
|
90
|
180
|
360
|
720
|
1,440
|
2,880
|
5,760
|
|
>100
|
16
|
32
|
64
|
128
|
256
|
512
|
1,024
|
|
|